Briefly, embodiments of the present invention provide an electro-mechanical device, for example, a Micro-Electro-Mechanical Systems (MEMS) device, for example, a low-loss Film Bulk Acoustic Resonators (FBAR) filter, and a process to produce the same.

 
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> Polymeric optical waveguide film, polymeric optical waveguide module and method of manufacturing polymeric optical waveguide film

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