A turbine component has a substrate formed from a ceramic material selected from the group consisting of a monolithic ceramic material and a composite ceramic material and a thermal barrier coating bonded to the substrate. In one embodiment, the ceramic material forming the substrate is selected from the group of silicon nitride and self-reinforced silicon nitride. In another embodiment, the ceramic material forming the substrate is selected from the group consisting of a silicon carbide-silicon carbide material and a carbon-carbon material. At least one bond coat layer may be interposed between the substrate and the thermal barrier coating.

 
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> Method of manufacturing a mask blank and a mask, the mask blank and the mask, and useless film removing method and apparatus

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