A scanning transmission electron microscope which enhances correction
accuracy of a de-scanning coil for canceling a transmitted-electron-beam
position change on an electron detector. Here, this
transmitted-electron-beam position change appears in accompaniment with a
primary-electron-beam position change on a specimen caused by a scanning
coil. First, control over the scanning coil is digitized. Moreover, while
being synchronized with a digital control signal resulting from this
digitization, values in a de-scanning table registered in a FM(2) are
outputted to the de-scanning coil. Here, the de-scanning table is created
as follows: Diffraction images before and after activating the scanning
coil and the de-scanning coil are photographed using a camera. Then,
based on a result acquired by analyzing a resultant displacement quantity
of the diffraction images by the image processing, the de-scanning table
is created.