The present invention provides a semiconductor memory device with reduced
soft error rate (SER) and a method for fabricating such a device. The
semiconductor memory device includes a plurality of implants of impurity
ions that provide for a reduced number of minority carriers having less
mobility. A fabrication process for the semiconductor memory includes a
"non-retrograde" implant of impurity ions that is effective to suppress
the mobility and lifetime of minority carriers in the devices, and a
"retrograde" implant of impurity ions that is effective to substantially
increase the doping concentration at the well bottom to slow down or
eliminate additional minority carriers.