A wafer test assembly includes multiple probe head substrates arranged
like tiles with connectors attached to one side and probes supported on
the opposing side. In one embodiment, flexible cable connectors directly
connect the connectors on the probe head tile to a test head, while in
another embodiment the flexible cables connect the probe head tile to a
PCB providing horizontal routing to test head connectors. In one
embodiment, leveling pins provide a simplified support structure
connecting to a retaining element attached to the tiles to provide for
applying a push-pull leveling force. A test head connector interface
frame enables rearrangement of connectors between the test head and the
probe card to provide for both full wafer contact or partial wafer
contact. The test head connectors are rearranged by being slidable on
rails, and unpluggable using pins, enabling movement over a range of
positions.