A method for measuring a target constituent of an electroplating solution
using an electroanalytical technique is set forth in which the
electroplating solution includes one or more constituents whose
by-products skew an initial electrical response to an energy input of the
electroanalytical technique. The method comprises a first step in which
an electroanalytical measurement cycle of the target constituent is
initiated by providing an energy input to a pair of electrodes disposed
in the electroplating solution. The energy input to the pair of
electrodes is provided for at least a predetermined time period
corresponding to a time period in which the electroanalytical measurement
cycle reaches a steady-state condition. In a subsequent step, an
electroanalytical measurement of the energy output of the
electroanalytical technique is taken after the electroanalytical
measurement cycle has reached the steady-state condition. The
electroanalytical measurement is then used to determine an amount of the
target constituent in the electroplating solution. An automatic dosing
system that includes the foregoing method and/or one or more known
electroanalytical techniques in a close-loop system is also set forth.