An exposure apparatus for exposing a subject to a pattern. The apparatus
includes an update system to update a parameter necessary for processing
in the exposure apparatus through measurement, a setting system to set a
validity period of the parameter updated by the update system, and a
control system to cause the update system to perform an update based on
the validity period. Prior to execution of a unit of the processing, the
control system determines whether the update by the update system is to
be performed, based on a predicted completion time of the unit and the
validity period.