As a polymer exhibiting improved transparency which is suitable for a
resist resin used in a chemical-amplification-type resist being
applicable for photolithography using exposure light at 180 nm or
shorter, this invention provides a polymer comprising a repeating unit
resulting from polymerization of a monomer exhibiting a polymerization
activity, wherein the monomer has a fluorine-containing acetal or ketal
structure represented by general formula (1): ##STR00001## wherein R
represents an atomic group containing a carbon-carbon double bond
exhibiting polymerization activity; at least one of R.sup.1 and R.sup.2
is fluorinated alkyl group or fluorinated aryl group having 1 to 20
carbon atoms; and R.sup.3 represents a radical selected from the group
consisting of hydrogen atom, alkyl group, alkoxy-substituted alkyl group,
fluorinated alkyl group, aryl group, fluorinated aryl group, aralkyl
group and fluorinated aralkyl group having 1 to 20 carbon atoms.