A rotary bearing for high speed and high temperature use is disclosed, the bearing having an inner race and an outer race with a roller ball positioned between the races, and a cooling fluid passageway passing through the races, where one of the passages in the outer race is directed radially inward toward the inner race and at substantially a tangent direction to the inner race, the tangential directed cooling passage providing a swirl to the cooling fluid such that the cooling fluid exits the outer race at a tangential velocity substantially equal to the rotational velocity of the inner race. Since the cooling fluid entering the inner race is traveling at a velocity substantially equal to the rotational velocity of the inner race, the temperature of the cooling fluid drops, and the cooling ability of the inner race is increased.

 
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> Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber

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