A photosensitive resin composition comprising a resin (A1) having fluorine
atom-containing groups, silicon atom-containing groups and ethylenic
double bonds, a radical initiator (B) and an alkali-soluble
photosensitive resin (D) having at least three ethylenic double bonds per
molecule. Further, a photosensitive resin composition comprising a resin
(A2) having fluorine atom-containing groups and ethylenic double bonds, a
resin (A3) having silicon atom-containing groups and ethylenic double
bonds, a radical initiator (B), and an alkali-soluble photosensitive
resin (D) having at least three ethylenic double bonds per molecule.