A system for detecting liquid flow from a nozzle in a semiconductor
processing device includes a first fiber optic sensor, a second fiber
optic sensor, and an amp. The first fiber optic sensor and second fiber
optic sensor are located on opposite sides of at least one nozzle. The
first fiber optic sensor transmits light, and the second fiber optic
sensor receives more of the light when the nozzle is not dispensing
liquid than when the nozzle is dispensing liquid. The amp is coupled to
the first fiber optic sensor and second fiber optic sensor. The amp
indicates whether the nozzle is dispensing liquid according to an amount
of the light received at the second fiber optic sensor.