A catalyst material for carbon nanotube synthesis includes a uniform
dispersion of host particles on a substrate. The host particles
themselves include catalyst nanoparticles that are effective to catalyze
nanotube syntheses reactions and provide nucleation sites. Methods for
preparing catalyst materials include co-sputtering a catalytic species
and a host species to form a precursor thin film on a substrate, followed
by an oxidation reaction of the precursor thin film in air. The precursor
thin film can be patterned on the substrate to limit the locations of the
catalyst material to well-defined areas. Methods for nanotube synthesis
employ CVD in conjunction with the catalyst materials of the invention.
During the synthesis, the catalyst nanoparticles catalyze carbon
nanotubes to grown from a carbon-containing gas.