An exposure apparatus for scanning an exposure spot in an exposure
allocated area and for exposing a desired pattern by controlling power of
the exposure spot in accordance with an exposure pattern, includes an
exposure unit for arranging plural fine exposure elements, for forming
plural exposure spots F1 to F9 on an object to be exposed, and for
previously defining the exposure allocated areas SA11 to SA19
respectively corresponding to the plural exposure spots F1 to F9, an
exposure allocated area adjuster for adjusting the exposure allocated
areas SA12 and SA15 in accordance with directions and sizes of offsets
(offset amount vectors V2 and V5) of the exposure spots F2 and F5 from a
reference position, and an exposure spot controller for controlling the
power of the exposure spot in accordance with the exposure pattern
corresponding to actual positions of the exposure spots F1 to F9.