A gate valve has a transfer chamber-side valve element and a process
chamber-side valve element connected to a single shaft. A rotary latch
pivotably supported on an inner surface of one of the valve element with
the rotary latch having a latch surface at a forward end thereof, wherein
when a rotational force is applied to the rotary latch in one direction,
the latch surface is pressed against a joint surface of the single shaft,
whereby the valve element is latched to said single shaft, and when a
rotational force is applied to the rotary latch in the opposite
direction, the latch surface is separated from the joint surface of the
single shaft to unlatch the valve element.