A substrate surface cleaning liquid medium and a cleaning method using the
cleaning liquid medium are capable of removing finely particulate
contaminants more efficiently than conventional techniques from
substrates for devices in the production of semiconductor devices,
display devices, etc., which cleaning liquid medium contains the
following ingredients (A), (B), (C), and (D), has a pH of 9 or higher,
and a content of ingredient (C) of 0.01 to 4% by weight: (A) an ethylene
oxide addition type surfactant which has an optionally substituted
hydrocarbon group and a polyoxyethylene group in the same molecular
structure and in which the ratio of the number of carbon atoms contained
in the hydrocarbon group (m) to the number of oxyethylene groups in the
polyoxyethylene group (n), m/n, is m/n.ltoreq.1.5, (B) an alkali
ingredient, (C) hydrogen peroxide, and (D) water.