To provide a fluoropolymer having functional groups and having high
transparency in a wide wavelength range, and a resist composition and a
composition for a resist protective film, comprising the fluoropolymer. A
fluoropolymer having monomer units formed by cyclopolymerization of a
fluorinated diene represented by the formula
(1):CF.sub.2.dbd.CFCF.sub.2C(CF.sub.3)(OR.sup.1)--(CH.sub.2).sub.nCR.sup.-
2.dbd.CHR.sup.3 (1)wherein R.sup.1 is a hydrogen atom, an alkyl group
having at most 20 carbon atoms, or (CH.sub.2).sub.aCOOR.sup.4 (wherein a
is 0 or 1, and R.sup.4 is a hydrogen atom or an alkyl group having at
most 20 carbon atoms), each of R.sup.2 and R.sup.3, which are independent
of each other, is a hydrogen atom or an alkyl group having at most 12
carbon atoms, and n is 0 or 2, provided that when n is 0, at least one of
R.sup.1, R.sup.2 and R.sup.3 is other than a hydrogen atom.