A pattern size correcting device includes: a testing photomask (1) having
a test pattern; a quantifying unit (2) that quantifies, using the testing
photomask (1), size variation in the test pattern as a function of
distance and in relation to an open area ratio; an open area ratio
calculating unit (3) that divides an exposure area having a plurality of
actual device patterns into a plurality of correction areas and
calculates the open area ratio of the respective correction areas; a data
correcting unit (4) that inputs the open area ratio calculated by the
open area ratio calculating unit (3) into a result of the quantification
that uses the photomask (1), calculates size variations of the actual
device patterns in the respective correction areas, and corrects design
data of the actual device patterns based on the calculation; and a
proximity effect correcting unit correcting a proximity effect. This
correcting device enables quantitative estimation of size variation
occurring in a pattern exposed in lithography and easy and accurate
correction of pattern size based on the estimation.