In one embodiment, a flexure stage comprises a base, a stage, a
positioning mechanism, and a control device. The base and stage have
first and second portions that are spaced apart from each other. The
positioning mechanism is coupled between the base and the stage. The
positioning mechanism includes an actuator and a flexure structure
engaged by the actuator. The flexure structure includes base links
coupled to the first base portion, stage links coupled to the first stage
portion, and an intermediate link coupled to both the base and stage
links. All structures are coupled by flexure hinge connections. The
control device generates a control signal to change position of the stage
by sending a control signal to the actuator which provides a force to
elastically deform the flexure structure and correspondingly move the
stage.