A new and improved wastewater treatment system suitable for the treatment of wastewater from a CMP process. A holding tank receives wastewater from a CMP wastewater collection tank. The holding tank may further receive wastewater from a backside grinding (BG) wastewater collection tank. A reaction tank receives wastewater from the holding tank. A coagulant polymer binds to the slurry particles in the reaction tank to precipitate the slurry particles out of solution. One or a pair of clarifiers receives the wastewater from the reaction tank, and the polymer-bound slurry particles are separated from the wastewater in the clarifier or clarifiers. An effluent collection tank receives the purified wastewater from the clarifier or clarifiers. The purified wastewater may be pumped to a storage tank such as a reused city water (RCW) tank for use in scrubber cleaning processes, for example.