Provided is a composition formed by hydrolysis and condensation
composition of the alkoxysilane, the composition comprising a reduced
amount of metallic and halogen impurities and being applicable as
electronic material. Also provided is an insulating film having low
dielectric constant produced by applying the composition and sintering
it. More specifically, a method for manufacturing a composition for
forming a film, comprising a step of hydrolysis and condensation of
alkoxysilane or a partial hydrolysis product of the alkoxysilane in an
organic solvent in the presence of trialkylmethylammonium hydroxide as
catalyst, wherein the alkoxysilane is selected from the groups consisting
of compounds represented by formulae (1) to (4) below, and the
trialkylmethylammonium hydroxide is represented by formula (5) below.
Provided are a composition for forming a film obtained by the method, and
a low dielectric constant film having low metallic and halogen
impurities, the film produced by applying the composition for forming a
film on a substrate and sintering it. ##STR00001##