A method of and apparatus for dispensing photosensitive solution
substantially reduces the amount of air bubbles in the photosensitive
solution during the dispensing operation. The photosensitive solution
dispensing apparatus includes at least one supply vessel that contains
the solution, a respective buffer tank that buffers the solution supplied
from each supply vessel, a filter unit for filtering the solution, a pump
for pumping the solution pumped from the buffer tank to the filter unit,
a dispensing nozzle connected to the filter unit, and a dedicated bubble
removal filter that is interposed between the buffer tank and the pump.
The bubble removal filter is configured to remove air bubbles from the
solution before the solution flows into the pump and is dispensed through
the nozzle.