A process for forming an MRAM element. The process comprises patterning a
globally deposited sense layer and then forming a spacer about the
patterned sense layer so as to cover the lateral edges of the patterned
sense layer. Subsequently, a globally deposited tunnel layer and fixed
layer are patterned so as to define the MRAM element. Preferably, the
pinned layer is patterned such that the outer lateral edges of the pinned
layer is displaced in a direction parallel to the substrate from the
lateral edges of the patterned sensed layer thereby reducing coupling
effects between the two layers. Moreover, the use of a spacer during the
process further inhibits shorting between the sense layer and the pinned
layer during patterning of the pinned layer.