A junction field effect transistor is described. The transistor is made
from a wide bandgap semiconductor material. The device comprises source,
channel, drift and drain semiconductor layers, as well as p-type
implanted or Schottky gate regions. The source, channel, drift and drain
layers can be epitaxially grown. The ohmic contacts to the source, gate,
and drain regions can be formed on the same side of the wafer. The
devices can have different threshold voltages depending on the vertical
channel width and can be implemented for both depletion and enhanced
modes of operation for the same channel doping. The devices can be used
for digital, analog, and monolithic microwave integrated circuits.
Methods for making the transistors and integrated circuits comprising the
devices are also described.