For measuring the three-dimensional shape of an object of measurement
using a phase shift method, a three-dimensional shortening the
measurement time. A printed state inspection device 1 includes a printed
circuit board K printed with cream solder H, an illumination device 3 for
illuminating three sine wave light component patterns with different
phases on the surface of printed circuit board K, and a CCD camera 4 for
picking-up images of the illuminated part of the printed circuit board K.
A control device 7 creates a chart representing a relationship between
brightness and coordinates for each light component from the image data
obtained by the illumination of the light component patterns and
determines relative phase angles among the light component patterns, and
calculates the height of the cream solder H from the image data and the
relative phase angles.