The present invention includes a substrate support system that features a
chuck body having a body surface with a pin extending therefrom having a
contact surface lying in a plane, with the pin being movably coupled to
the chuck body to move with respect to the plane. As a result the
substrate support system attenuates if not avoids generating
non-planarity in a substrate that results from a presence of particulate
contaminants. This is achieved by fabricating the pin to be compliant,
allowing the same to move to accommodate the presence of the particle
while maintaining sufficient planarity in the substrate.