A plating apparatus and a plating liquid removing method removes a plating
liquid remaining on a substrate-contacting portion, or portions in its
vicinity, of a substrate holding member. The plating apparatus comprises
a head having a rotatable housing provided with a substrate holding
member for holding a substrate, a plating process container, disposed
below the head, for holding a plating liquid therein, and a plating
liquid removing mechanism for removing plating liquid remaining on the
substrate-contacting portion, or the portions in its vicinity, at an
inner circumferential edge of the substrate holding member.