There is provided a collector for illumination systems for light having a
wavelength .ltoreq.193 nm comprising. The collector includes (a) a first
mirror shell adjacent to, and positioned inside of, a second mirror shell
around a common axis of rotation, in which the first and second mirror
shells are rotationally symmetric, and (b) a component in a region
between the first and second mirror shells. The collector is for
receiving the light from a light source via an object-side aperture and
for illuminating an area in an image-side plane, and the region is not
used by the light.