A silicon die having an orifice layer with plural openings formed therein defines a drop ejection device for use in a handheld inhaler. An underlying control layer defines fluid chambers, each carrying a heat transducer. A control system energizes selected heat transducers to heat fluid in the chambers, vaporizing the fluid, which is ejected through the orifices in small droplets.

 
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> Metering valve for a metered dose inhaler providing consistent delivery

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