Provided is an ultra-precision positioning system. The system comprises a
base, a motion stage movably provided to the top of the base, and first
to sixth feeding mechanisms for moving the motion stage to have six
degrees of freedom. The first to sixth feed mechanisms are fixed to the
base and the motion stage, respectively. Each of the first to third
feeding mechanisms has a piezo actuator and two elastic hinges provided
at both sides of the piezo actuator. Each of the fourth to sixth feeding
mechanisms has a piezo actuator, three hinge members, and a lever member
with a notch hinge which operatively cooperates with the hinge members.