A sputtering apparatus is provided with a DC power supply 1, an inverter 2
that converts DC voltage to AC voltage, a matching circuit 10 that
transforms the AC voltage, a rectifier 4 that converts the transformed AC
voltage to direct current, and a sputtering load 6. The matching circuit
10 has a transformer 3 that transforms AC voltage from the inverter 2,
inductance L provided in series with at least one of the primary winding
31 and secondary winding 32, and a condenser C provided in parallel with
at least one of the primary winding 31 and secondary winding 32 through
inductance L.