In a semiconductor integrated circuit device, testing pads (209b) using a
conductive layer, such as relocation wiring layers (205) are provided
just above or in the neighborhood of terminals like bonding pads (202b)
used only for probe inspection at which bump electrodes (208) are not
provided. Similar testing pads may be provided even with respect to
terminals like bonding pads provided with bump electrodes. A probe test
is executed by using these testing pads or under the combined use of
under bump metallurgies antecedent to the formation of the bump
electrodes together with the testing pads. According to the above, bump
electrodes for pads dedicated for probe testing may not be added owing to
the use of the testing pads. Further, the use of testing pads provided in
the neighborhood of the terminals like the bonding pads and smaller in
size than the under bump metallurgies enables a probe test to be executed
after a relocation wiring process.