Provided are a temperature-insensitive polymeric optical AWG device and
method of manufacturing the same. The temperature-insensitive polymeric
optical AWG device includes: polymeric grating channel waveguides
interposed between free propagation slab regions on a substrate between
the input and output waveguides and having different lengths; a plurality
of hollow trenches formed by selectively etching a surface of the
substrate under the polymeric grating channel waveguides and allowing the
polymeric grating channel waveguides to freely thermally expand from the
substrate depending on a temperature variation; and a shield layer
shielding entrances of the hollow trenches so that the polymeric grating
channel waveguides do not flow into the hollow trenches.