An inspection system for detecting anomalies on a substrate. A first
network is coupled to the sensor array and communicates image data.
Process nodes are couple to the first network, and process the data to
produce reports. Each process node has an interface card that formats the
data for a high speed interface bus that is coupled to the interface
card. A computer receives and processes the data to produce the report. A
second network receives the reports from the process nodes. A job manager
is coupled to the second network, and receives the reports from the
process nodes and sends information to the process nodes to coordinate
the processing of the data in the process nodes.