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A probe card for testing semiconductor wafers, and a method and system for
testing wafers using the probe card are provided. The probe card is
configured for use with a conventional testing apparatus, such as a wafer
probe handler, in electrical communication with test circuitry. The probe
card includes an interconnect substrate having contact members for
establishing electrical communication with contact locations on the
wafer. The probe card also includes a membrane for physically and
electrically connecting the interconnect substrate to the testing
apparatus, and a compressible member for cushioning the pressure exerted
on the interconnect substrate by the testing apparatus. The interconnect
substrate can be formed of silicon with raised contact members having
penetrating projections. Alternately the contact members can be formed as
indentations for testing bumped wafers. The membrane can be similar to
multi layered TAB tape including metal foil conductors attached to a
flexible, electrically-insulating, elastomeric tape. The probe card can
be configured to contact all of the dice on the wafer at the same time,
so that test signals can be electronically applied to selected dice as
required.
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> Phenyl-5,6,6A,7,8,9-hexahydro-4H-1,4,9-triaza-phenalene derivatives as CRF antagonists
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~ 00367
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