Resolution enhancement techniques (RETs) aid in accurately transferring
features on a layout to a wafer. Unfortunately, RETs may work well at one
pitch but not another pitch. If image quality falls below an acceptable
threshold at a certain pitch, then such a pitch is called a forbidden
pitch. A cell library cell that can automatically avoid forbidden pitches
is provided. In this method, evaluation points on edges of a feature in a
cell can be analyzed based on a RET and a lithography model. Using this
analysis, any forbidden pitch for the feature can be identified.
Additionally, any forbidden pitch can be changed to an acceptable pitch,
i.e. a pitch resulting in an acceptable image quality. The forbidden
pitch information and the associated acceptable pitch information for the
feature can be stored in a database to facilitate analyzing other
features/cells.