A bismuth yttrium titanate (BYT) film having the composition of formula
(I) has enhanced residual polarization and electric fatigue properties
with excellent ferroelectric property, and therefore, it can be
advantageously used in an electric or electronic device including a FRAM
device: Bi.sub.4-xY.sub.xTi.sub.3O.sub.12 (I) wherein x is an integer of
0.1 to 2.