This invention presents a process to produce bulk quantities of nanowires
of a variety of semiconductor materials. Large liquid gallium drops are
used as sinks for the gas phase solute, generated in-situ facilitated by
microwave plasma. To grow silicon nanowires for example, a silicon
substrate covered with gallium droplets is exposed to a microwave plasma
containing atomic hydrogen. A range of process parameters such as
microwave power, pressure, inlet gas phase composition, were used to
synthesize silicon nanowires as small as 4 nm (nanometers) in diameter
and several micrometers long. As opposed to the present technology, the
instant technique does not require creation of quantum sized liquid metal
droplets to synthesize nanowires. In addition, it offers advantages such
as lower growth temperature, better control over size and size
distribution, better control over the composition and purity of the
nanowires.