A method for manufacturing a surface acoustic wave element including:
forming a conductive film on a surface of a piezoelectric substrate;
forming a photoresist film on the conductive film; printing a pattern by
exposing and developing the pattern, which is originally provided on a
photomask, onto the photoresist film by reduced projection; forming an
electrode of a surface acoustic wave element by etching the conductive
film using the patterned photoresist film as a mask; measuring a resonant
frequency of the surface acoustic wave element formed on the
piezoelectric substrate; calculating an anodic oxidation voltage based on
an amount of anodic oxidation of the electrode that is calculated in
advance from the measured resonant frequency and a preset target resonant
frequency; and performing anodic oxidation based on the anodic oxidation
voltage calculated in the voltage calculation step and finishing anodic
oxidation after detecting an end-point of oxidation reaction of the
electrode.