A method and an apparatus or machining a workpiece include the use of a cryogenically cooled oxide containing ceramic cutting tool. The method involves cryogenic cooling of the cutting tool during a cutting operation, which cooling results in enhanced wear resistance and fracture resistance of the cutting tool. A preferred embodiment involves jetting a cryogenic fluid directly at the cutting tool.

 
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> Acidic chemistry for Post-CMP cleaning using a composition comprising mercaptopropionic acid

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