There is provided a pivoting apparatus of an industrial robot including: a brake 40 that is fixed to a motor shaft 30s of a motor 30 to halt the motor 30; an encoder 50 that is fixed to the motor shaft 30s to detect the pivoting angle of the motor 30; a speed reducer 60 that is coupled with the motor shaft 30s to form a communicating hollow portion, that is fixed to and coupled with a pivoting-side arm 20, and that reduces the rotation speed of the motor 30; a pipe-supporting bearing 72 that is provided in a fixed-side arm 10 and that is communicated with the communicating hollow portion; and a low-speed pivoting pipe 70 whose one end is fixed to and coupled with the pivoting-side arm 20 and the other end of which is fixed to the pipe-supporting bearing 72, and through which a cable 80 is wired.

 
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> Lithographic apparatus and device manufacturing method

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