The object of the invention is to provide an antistatic agent exhibiting
an excellent property of preventing film-thinning phenomenon and fogging
in chemically amplified resists, an antistatic film using the antistatic
agent and a product coated therewith.
The antistatic agent comprising the water-soluble electroconductive
polymer, the solvent and the water-soluble polymer. By using a
water-soluble polymer, especially a water-soluble polymer compound having
a polypeptide bond or a specific water-soluble polymer compound having a
polyvinyl structure in combination with a water-soluble electroconductive
polymer in an antistatic agent, influences on resist (such as fogging,
film-thinning phenomenons and dissolution of resist after developing of
resist) can be suppressed even when surfactant is added into the
antistatic agent for the purpose of imparting coatability inexpensively
and easily, while maintaining coatability of the agent. An antistatic
agent having improved coatability by comprising surfactant may cause
mixing, which leads to development defects and changes in the developing
time, not only in chemically amplified resist but also in non-chemically
amplified resist used for microfabrication.