A method of verifying photomask-pattern-correction results includes steps
of cutting away photomask patterns of a region to be subjected to
correction, forming photoresist models used for execution of an
optical-proximity-effect-correction operation, executing the
optical-proximity-effect-correction operation of the photomask patterns
with respect to the photoresist models, executing an exposure simulation
for simulating photoresist patterns formed on a photoresist film to which
the photomask patterns are transferred after the
optical-proximity-effect-correction operation, and designating parameters
required for executions of the cutting away the photomask patterns of the
region, the forming of the photoresist models, the
optical-proximity-effect-correction operation, and the exposure
simulation.