A positive resist composition comprising: at least two resins which differ
in glass transition temperature by at least 5.degree. C.; and a compound
which generates an acid upon irradiation with actinic rays or radiation,
wherein each of the two resins comprises at least either of a repeating
unit derived from an acrylic acid derivative monomer and a repeating unit
derived from an methacrylic acid derivative monomer and further comprises
an alicyclic structure and at least one group that increases a solubility
of the resin in alkaline developer by the action of an acid.