Causing the growth of a GaN material with respect to a sapphire substrate
using a conventional technique is inevitably followed by the occurrence
of dislocations. Using a mask layer results in that the dislocations
laterally flow. However, since the GaN crystal collides with a
semiconductor layer that laterally grew from an adjacent region, perfect
elimination of the dislocations is impossible. In view thereof, the
invention is intended to provide a nitride compound-based semiconductor
light emitting device which is based on using semiconductor layers that
have been formed in a state of the dislocations' being less existent
therein and which therefore has excellent property. To solve the
above-described problems, the invention provides a semiconductor light
emitting device being a gallium nitride-based semiconductor light
emitting device that not only is equipped with a substrate but is also
equipped with at least a first conductivity type semiconductor layer,
active layer, and second conductivity type semiconductor layer in this
sequential order on the substrate, wherein the first conductivity type
semiconductor layer has a level difference portion the levels of which
have a spacing therebetween in the lamination direction; and the
dislocation density of the active layer that is formed on a portion of
the first conductivity type semiconductor layer that has the higher level
is lower than that of the active layer that is formed on a portion
thereof that has the lower level.