The present invention provides a method, an apparatus, and an automated
semiconductor fabrication facility for determining control information
based on global goals of a semiconductor manufacturing facility. The
method includes accessing information indicative of at least one global
goal of a semiconductor manufacturing facility, determining control
information based on the at least one global goal, and providing a
portion of the control information to each of a plurality of control
units. Each of the plurality of control units is configured to control a
corresponding manufacturing activity based on the provided portion of the
control information.