An integrated circuit is provided including forming a porous ultra-low
dielectric constant dielectric layer over a semiconductor substrate and
forming an opening in the ultra-low dielectric constant dielectric layer.
A dielectric liner is formed to line the opening to cover the pores in
the ultra-low dielectric constant dielectric layer and a barrier layer is
deposited to line the dielectric liner and conductor core is deposited to
fill the opening over the barrier layer.