A method for verifying scan precision of a laser measurement machine
includes the steps of: preparing a transparent flat, of which the
flatness of each plane is regarded as a flatness conventional true value;
determining an optimum scanning mode; determining optimum scanning
parameters under the optimum scanning mode; scanning the transparent flat
under the optimum scanning mode and the optimum scanning parameters for
certain times, and obtaining measuring data; calculating a plurality of
flatness values using the measuring data; calculating an average value
and a standard deviation of the flatness values, and a bias between the
average value and the flatness conventional true value; evaluating the
repetitiveness of the laser measurement machine according to the standard
deviation; and evaluating the veracity of the laser measurement machine
according to the bias.