Semiconductor devices and methods for fabricating the same. The
semiconductor device includes a resistance-reduced transistor with
metallized bilayer overlying source/drain regions and gate electrode
thereof. A first dielectric layer with a conductive contact overlies the
resistance-reduced transistor. A second dielectric layer having a first
conductive feature overlies the first dielectric layer. A third
dielectric layer with a second conductive feature overlies the second
dielectric layer, forming a conductive pathway down to the top surface of
the metallized bilayer over one of the source/drain regions or the gate
electrode layer.