One embodiment of the present invention provides a system that computes
translational differentials between a database-image and a scanned-image
of a photomask. During operation, the system receives a noise-free
database-image and a scanned-image that is generated by an imaging
process. Next, the system determines whether the database-image has
complex geometry and whether the database-image is a line-and-space
pattern. If the database-image is a line-and-space pattern, the system
first converts the scanned-image into a polarity-enhanced-image. The
system then computes translational differentials by performing a
correlation using the database-image and the polarity-enhanced-image. On
the other hand, if the database-image is not a line-and-space pattern,
the system computes translational differentials by performing a
correlation using the database-image and the scanned-image. Note that the
accuracy of the computed translational differentials is significantly
increased because the system chooses a technique for computing the
translational differentials which is suitable for the type of pattern
present in the database-image.