A method and system is provided for performing edge correction on a mask
design. Aspects of the invention include initially fragmenting boundaries
of the mask design for optical proximity correction, whereby edge
segments of the boundaries are moved by a distance value; interpreting
the moved edge segments by defining a new endpoint for respective pairs
of neighboring edge segments that meet at an angle, the endpoint being a
location of where lines on which the edge segments lie intersect, wherein
the new endpoint is used to create a smoothed feature, resulting in a
smoothed OPC mask; calculating distances between all pairs of comparable
edge segments of the smoothed OPC mask; comparing the distances to a
design rule limit; for each edge segment having a distance that exceeds
the design rule limit, decreasing the segment's distance value; and
optimizing the mask design by repeating the above steps until no distance
violations are found.